Microfabrication

Mold Fabrication Station

A complete photolithography station for master mold manufacturing

High Resolution

Unlock 2µm definition

Clean Room-Free

Produce in your own lab

No Experience Needed

Dive into Mold Making with the help of our experts

Tailored Solutions

Customized to suit your needs

Talk to an expert

Highlights

Turnkey: Equipped with all essentials – equipment, accessories, and reagents – for impeccable Master Mold production.
Customized: Access the perfect instruments tailored to your microfluidics and experimental needs, also adaptable to your existing equipment.
Upgradable: Various options such as alignment or maskless options can be included or integrated later.
Training: Our microfluidics expert offers installation services and comprehensive training in microfabrication, ensuring swift mastery of the photolithography process.

Personalized training

Experienced support team

1 to 3 hours of production time

2 𝜇m spatial resolution

STARTER

Fast prototyping, solvent-free process, mid-resolution

ADVANCED

Automated process, high reproducibility, high-resolution

SU8 Master mold

ROLLING-MILL	SPIN COATER
UV LAMP
HOT PLATE
ACCESSORIES & CHEMICALS
PROCESS-SHEET & TUTORIALS

Two different ranges of support:

Standard Support Pack
Extended Support Pack

	Standard Support Pack	Extended Support Pack

Bandwidth	Full access to support sheets and tutorials & 1-year expert assistance	On-site installation and training from our experts

Illustrations designed with Biorender.com

Specifications

USE AT STEP 1 OF THE MASTER MOLD FABRICATION METHOD

This rolling mill is perfectly adapted to do dry-film photoresist lamination. Easy and fast to use, it will adapt to all kinds of wafer sizes.

The homogenous pressure between the rolls and the adjustable parameters (temperature and rolling speed) offers a clever tool for an optimized photolithography process.

Major strengths:

Easy to control with the LCD panel
Temperature monitoring between RT and 140°C
Different possible speed
Forward and backward displacement

USE AT STEP 1 OF THE MASTER MOLD FABRICATION METHOD

This compact spin coater is equipped with advanced features, including a centering tool and a removable PTFE liner for easy cleaning, making it robust and long-lasting.

It accommodates wafers up to 6 inches (150mm) in diameter and 5″ x 5″ (127mm x 127mm) square substrates, and is precisely calibrated for the controlled and repeatable application of photoresists or PDMS layers.

Additionally, the lid features a hole that allows for dynamic coating. Its compact size and integrated control panel enhance its portability.

Major strengths:

User friendly design
Easy programmation from the operator panel or your PC
Ability to set complex sequences with several accelerations and speeds
Non-clogging system for extended lifetime

USE AT STEP 3 OF THE MASTER MOLD FABRICATION METHOD

This UV Lamp is a robust and compact tabletop system that supports samples up to 4 inches in diameter, with an option for 6-inch samples.

It features automated chuck movement with variable mask-to-substrate distance control, allowing for both hard (physical) and soft (proximity) masking contacts.

The specialized optics provide highly collimated light for low-resolution (2 µm) printing and thick layer applications (several hundred micrometers). These capabilities make it particularly well-suited for microfluidic applications. Its small size allows for versatile installation, including outside a clean room.

Major strengths:

Very compact system (26x26x26cm)
LEDs source for stability over time. Long LED lifetime
Plug & Play touch screen
Usable with glass and plastic mask
High collimated light (<2°)
High depth of focus for large thickness printing

USE AT STEP 2 AND 4 OF THE MASTER MOLD FABRICATION METHOD

Ensure accurate, homogeneous, and stable temperature set points.

This digital hotplate enables the programming of temperature ramp protocols. In addition, its aluminum thick top plate allows slow cooling, ideal for many photoresist references.

Make your life easier by automating the soft bakes and post-exposure bakes to benefit from an optimized photolithography process.

Major strengths:

Temperature ramp to heat up and cool down
High-temperature uniformity over 4 inches wafer
No temperature sensor drifts over time
Microprocessor display maintains a consistent temperature
Automatic timer
Smoothed aluminum plate for easy photoresist cleaning
Control time count, temperature, and set point directly from your PC

Accessories

All lab accessories (silicon wafers, tweezers, scalpels, air guns, micropipet, etc.) are included. We also provide all product references for you to refill your stock in the future.

Chemicals

All chemicals (SU8 photoresist, Adherence promoter, SU8 developer, etc.) are included. We also provide all product references for you to refill your stock in the future.

Optional

Mask aligner: produce multilayer molds with high alignment accuracy
Maskless System: instantly write your designs, from your brain to photoresist without intermediaries

Microfabrication

Mold fabrication station

A complete photolithography station for master mold manufacturing

Talk to an expert

High resolution

Unlock 2µm definition

CLean room-free

Become autonomous with our training and plug & play instrument

No experience needed

Dive into Mold Making with the help of our experts

Tailored solutions

Customized to suit your needs

Mold fabrication station

A complete photolithography station for master mold manufacturing

Talk to an expert

Need help or technical information?

Talk to an expert

Need help or advice?

For any help to determine what microfluidic instruments you need, you can contact us!
Our experts will help you build the best microfluidic setup for your application, with our state-of-the-art microfluidic line.