SU8 mold station

SU8 station

A complete station to fabricate your SU8 mold

Save time

We provide and install all equipments in your lab

Easy to Use

Instruments and training to start making microchips in one week

Save Space

The equivalent of a conventional clean room in 3 m2

High resolution

Reach the same resolution than the one you can get inside a clean room

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Features & benefits

Benefits

Reach the same pattern resolution as in a clean room.
Get strong photoresist patterns for numerous future PDMS moldings.
Work with robust processes for easy reproducibility.
Fabricate your molds without initial knowledge of microfabrication.
Get the best equipment to ensure your microfabrication for a long lifetime.

Included

Equipment:

UV Lamp with UV LED
Highly versatile Spin Coater
Programmable Hot plate

Accessories:

All lab accessories (Silicon wafers, tweezers, pipette, tips, timer, etc.) are included. We give you all the products’ references and providers’ information to refill your stock.

Chemicals:

All chemicals (SU8, Adherence promoter, SU8 developer, Isopropanol, Acetone, etc.) are included. We give you all the products’ references and providers’ information to refill your stock.

Support

Standard support pack: We take care of the after-sales of all your instruments. We provide you with a microfabrication process sheet and tutorials and one-year phone assistance to answer any microfabrication questions you might have.
Extended support pack: In addition to the standard pack, our R&D team will also install the Softlithobox directly in your lab. This way, we can better adapt all our microfabrication processes on site, fitted to your needs. We also train your team so they become ready to fabricate your microfluidic chips straight away.

Spin-coater

This spin coater is both compact and equipped with advanced features such as a centering tool and a removable PTFE liner for easy cleaning. It accommodates wafers up to 6 inches in diameter (150mm) and square substrates measuring 5 inches x 5 inches (127mm x 127mm).The device is finely calibrated to allow for controlled and repeatable applications of photoresists or PDMS layers. Additionally, the lid features a hole to facilitate dynamic coating.

Its compact size, coupled with the attached control panel, enhances its portability. Furthermore, a built-in safety device prevents solvents from entering the engine, ensuring its longevity.

Major strengths:

Specifically designed for ease of use.
Simple programming options from the operator panel or via your PC.
Capability to set complex sequences with multiple accelerations and speeds.
Easy to clean.
Features a non-clogging system to extend its lifetime.
Low vibration operation.
Capable of speeds up to 12,000 rpm.
Available with a wafer-centering tool.

UV Lamp

This UV Lamp is a robust and compact tabletop system, accommodating samples up to 4 inches in diameter, with a 6-inch option also available. It features automated chuck movement, offering variable mask-to-substrate distance control and enabling both hard (physical) and soft (proximity) masking contacts. A specialized optic provides highly collimated light, suitable for low-resolution (2µm) printing and thick layer printing (several hundred micrometers). These features make this device particularly well-suited for microfluidic applications. Its compact size allows for flexible installation in various locations, including outside of a clean room.

Major strengths:

Provides perfectly monochromatic exposure across the wafer surface area (bandwidth lower than 10 nm).
Cold UV exposure feature.
The light’s divergence angle is less than 2°.
High power density with no warm-up time required.
Long LED lifetime: over 10,000 hours, equivalent to 8 – 10 years of use.
Fast LED switch on/off capability for photoresist flashing.
User-friendly touchscreen interface for programming exposure cycles.
Intuitive control of UV source intensity.
Automated wafer loading and unloading system.
Compatible with glass and plastic photomasks.
Directional UV beam and integrated UV meter.
No variation in UV power over time.
High UV uniformity on 4-inch wafers.

Hot plate

Ensure accurate, homogeneous, and stable temperature set points with this digital hotplate.

It allows for the establishment of a temperature ramp, facilitating the transition from one temperature to another before maintaining a stable temperature for a specified period.

Additionally, its thick aluminum top plate promotes slow cooling, which is ideal for various photoresist applications. Simplify your workflow by automating soft bakes and post-exposure bakes, thereby optimizing the photolithography process.

Major strengths:

Temperature ramp for heating up and cooling down.
High-temperature uniformity across a 4-inch wafer.
No drift in temperature sensors over time.
Microprocessor display ensures consistent temperature maintenance.
Minimal temperature overshoot.
Automatic timer functionality.
Smooth aluminum plate for easy photoresist cleaning.
Control time count, temperature, and set points directly from your PC.

An adaptive offer!

Since each laboratory is different, since each research is unique, we do adapt the offer to be as close as possible of the real need. We discuss together what will be the best efficient facility and thus add or remove equipment, accessories, chemicals.

Do not hesitate to ask one of our technico-commercials to make an assessment of your facility and to advice you on your project.

Options

We have created basic offers with everything needed to have a complete working set, but some options can be added according to each situation. We have selected some options commonly used during softlithography processes but do not hesitate to ask our engineer if you have special expectations.

Air compressor

Vacuum pump

Developer Agitator

Need help or technical information?

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Need help or advice?

For any help to determine what microfluidic instruments you need, you can contact us!
Our experts will help you build the best microfluidic setup for your application, with our state-of-the-art microfluidic line.