Master-Mold-UV-lampmicrofabrication-station

PDMS chip replication station elveflow scaled

Microfabrication

Full Microfabrication station

A turnkey offer to fabricate your own molds and chips

Talk to an expert

Time & space-saving

Install all equipment in 3m² lab space without a cleanroom

User-friendly

Become autonomous with our training and plug & play instrument

High-resolution

Reach great resolution with a robust and repeatable process

Adapted to your needs

Customize the packs to your needs, microfluidic designs, and equipment

HIGHLIGHTS

Comprehensive Microfabrication Solutions

Turnkey solutions

We provide everything you need to create quality microfabrication master molds and PDMS chips, including all necessary equipment, accessories, and reagents.

Plug & play systems

Master the technique quickly with our plug-and-play systems, which enable seamless customization of your microfluidic devices.

One-stop-shop provider

Rely on one provider for all your microfabrication equipment and support needs, covering the entire process from start to finish.

Tailored equipment

Receive equipment tailored to your specific microfluidics and experimental requirements. We can also validate and incorporate any existing equipment you own into your setup.

Upgradable stations

Start with a PDMS station and expand as needed. Our customizable stations allow you to add components like a photolithography station for mold production, or to upgrade from a starter kit to high-resolution, automated systems.

Training and expertise

Our microfluidics expert provides in-depth, on-site training to ensure you’re fully equipped to produce microfluidic devices with ease.

Support Options

Standard support pack

Gain full access to process sheets, tutorials, and one year of expert assistance for any microfabrication questions. Our team also provides after-sales support for all instruments in your station.

Extended support pack

Enjoy all the benefits of the standard pack, plus personalized support from our microfabrication and microfluidics experts. This includes tailored process design, equipment installation in your lab, and on-site training for your team to start fabricating microfluidic devices immediately.

Contact our experts to receive customized advice that fits your needs.

1 ROBUST PROCESS WITH 2 𝜇m RESOLUTION

2 hours of production time

Experienced support team

PDMS Chip Replication Station
Starter Station Super fast & easy prototyping, mid-resolution	Advanced Station High-resolution and reproducibility, versatility
Desiccator
Oven
Plasma Bonding Pen	Plasma Kit (Plasma Chamber/Vacuum Pump/Equinox Vacuum Gauge)
Ultrasonic bath
Accessories (Petri Dish, Stirring Rod, Scalpel, Cutting Mat, Scotch)
Chemicals

Mold Fabrication Station
Starter Station	Advanced Station
Rolling-mill	Spin coater
UV Lamp
Hot Plate
Accessories All lab accessories (silicon wafers, tweezers, glass slides, Petri dishes, disposable cups, stirring rods, scalpels, air guns, etc.) are included. We also provide all product references for you to refill your stock in the future.
Chemicals All chemicals (SU8 photoresist, Adherence promoter, SU8 developer, PDMS monomer, curing agent, etc.) are included. We also provide all product references for you to refill your stock in the future.

SPECIFICATIONS

USE AT STEP 2 AND 4 OF THE MASTER MOLD FABRICATION METHOD

Ensure accurate, homogeneous, and stable temperature set points.

This digital hotplate enables the programming of temperature ramp protocols. In addition, its aluminum thick top plate allows slow cooling, ideal for many photoresist references.

Make your life easier by automating the soft bakes and post-exposure bakes to benefit from an optimized photolithography process.

Major strengths:

Temperature ramp to heat up and cool down
High-temperature uniformity over 4 inches wafer
No temperature sensor drifts over time
Microprocessor display maintains a consistent temperature
Automatic timer
Smoothed aluminum plate for easy photoresist cleaning
Control time count, temperature, and set point directly from your PC

USE AT STEP 1 OF THE MASTER MOLD FABRICATION METHOD

This compact spin coater is equipped with advanced features, including a centering tool and a removable PTFE liner for easy cleaning, making it robust and long-lasting.

It accommodates wafers up to 6 inches (150mm) in diameter and 5″ x 5″ (127mm x 127mm) square substrates, and is precisely calibrated for the controlled and repeatable application of photoresists or PDMS layers.

Additionally, the lid features a hole that allows for dynamic coating. Its compact size and integrated control panel enhance its portability.

Major strengths:

User friendly design
Easy programmation from the operator panel or your PC
Ability to set complex sequences with several accelerations and speeds
Non-clogging system for extended lifetime

USE AT STEP 3 OF THE MASTER MOLD FABRICATION METHOD

This UV Lamp is a robust and compact tabletop system that supports samples up to 4 inches in diameter, with an option for 6-inch samples.

It features automated chuck movement with variable mask-to-substrate distance control, allowing for both hard (physical) and soft (proximity) masking contacts.

The specialized optics provide highly collimated light for low-resolution (2 µm) printing and thick layer applications (several hundred micrometers). These capabilities make it particularly well-suited for microfluidic applications. Its small size allows for versatile installation, including outside a clean room.

Major strengths:

Very compact system (26x26x26cm)
LEDs source for stability over time. Long LED lifetime
Plug & Play touch screen
Usable with glass and plastic mask
High collimated light (<2°)
High depth of focus for large thickness printing

PDMS chip replication oven elveflow microfabrication 1

USE AT STEP 3 OF THE PDMS REPLICATION METHOD

Natural convection drying oven. Frontal panel with bimetallic fluid expansion probe thermo regulator. Its minimum footprint enables fast preheating and small electric consumption. It is a really movable device and can be installed everywhere.

This oven for 4-inch wafers will allow you to cure your PDMS efficiently. Indeed its size is adapted for a Petri dish size to heat two molds at once.

Major strengths:

Internal chamber in aluminum for better heat diffusion.
Adjustable flow of air going inside the chamber for venting.
Small footprint adapted to 15mm Petri dish.
Two internal shelves.
Light warning during heating.
Temperature range: Ambient +1°C to 150°C
Timer goes from 1 to 120 minutes.
Dimensions : 380x240x300 mm.

USE AT STEP 1 OF THE MASTER MOLD FABRICATION METHOD

This rolling mill is perfectly adapted to do dry-film photoresist lamination. Easy and fast to use, it will adapt to all kinds of wafer sizes.

The homogenous pressure between the rolls and the adjustable parameters (temperature and rolling speed) offers a clever tool for an optimized photolithography process.

Major strengths:

Easy to control with the LCD panel
Temperature monitoring between RT and 140°C
Different possible speed
Forward and backward displacement

USE AT STEP 5 OF THE PDMS REPLICATION METHOD

Elveflow’s Plasma Bonding Pen is a two-in-one handy tool for optimized surface treatment, ideal for bonding PDMS to glass and PDMS to PDMS. Additionally, it offers advanced surface modification capabilities commonly found in traditional plasma chambers but with a portable and straightforward approach.

Major strengths:

Plug and press button to generate plasma.
A small screen allows you to control various parameters.
Easy to handle, generating minimal background noise.
Replaceable head for longer lifetime.

USE AT STEP 1 OF THE PDMS REPLICATION METHOD

This compact desiccator enables you to do a simple and fast degassing of your PDMS. Compatible in size with a cup or petri dish, it is totally fitted for a PDMS soft lithography process.

Major strengths:

Lightweight and easy to handle.
Perfectly fit for PDMS degassing.
Includes polycarbonate lid, polypropylene base, and desiccant tray.
Ventilation cap with non-return valve in the lid.

USE AT STEP 5 OF THE PDMS REPLICATION METHOD

This air plasma kit is perfectly adapted for efficient and reproducible PDMS bonding.

Major strengths:

Chamber dimension: Ø152×175 (in mm).
Only requires an electric plug for power.
Optimized for PDMS bonding, with glass or PDMS.
Three different pressure units available.
Fine vacuum tuning and comes with a numeric vacuum gauge.
Compatible with 3,4 ,5, 6- inch wafers.

The plasma chamber is delivered with a fitted pump and a pressure controller to master precisely and easily the chamber pressure.

Very compact and easy to use, no longer worry about knowing if your chips are well sealed, just trust your process.

This ultrasonic bath is perfect for optimizing the cleanliness of your PDMS chips before bonding.

Very compact and easy to use, it will fit perfectly into your laboratory for an optimized soft lithography process.

Major strengths:

Operating time selection programs: 90 s, 180 s, 280 s, 380 s, 480 s.
Maximum cleaning power: 42 K Hz.
Stamped stainless steel inner tank.
PVC outer casing, grid basket, and cover.

Accessories

All lab accessories (silicon wafers, tweezers, scalpels, air guns, micropipettes, glass slides, Petri dishes, disposable cups, stirring rods, etc.) are included. We provide all the product references and suppliers’ information to help you easily refill your stock in the future.

Chemicals

All chemicals (SU8 photoresist, adherence promoter, SU8 developer, PDMS, curing agent, Hellmanex solvent, etc.) are included. We also provide all product references and suppliers’ information so you can refill your stock whenever needed.

OPTIONAL